“Our customers are highly motivated to continue to extend optical inline defect inspection beyond the 20nm node,” said Keith Wells, vice president and general manager of the Wafer Inspection (WIN) ...
KLA has announced the launch of four new products for automotive chip manufacturing: the 8935 high productivity patterned wafer inspection system, the C205 broadband plasma patterned wafer inspection ...
A technical paper titled “In situ electrical property quantification of memory devices by modulated electron microscopy” was published by researchers at Hitachi High-Tech Corporation, KIOXIA ...